SPEC - Semiconductor Process Equipment Corp.

We specialize in integrated wet bench systems for any cleanroom environment.

Wet Benches - Silicon Wafers 2" to 300mm - Specialized Substrates 300mm x 300mm and up to 700mm diameter - Polysilicon Chunk Cleaning - Quartz Tubes - Crucible Filaments - Disk Drive Media and Heads - Bump Packaging - Electroless and Electroplating - UBM Under Bump Metallization - Wafer Processing - Etch - Solvent - Diffusion - Prediffusion - Oxide - Nitride - Resist - Photo resist - Biotech - DNA Arrays - Subdermal Sensors - PLC Programmable Logic Controllers - Quartz Tanks - Linear Transfer - Rotary Transfer - Chemical Dispense Systems - Waste Collection Systems - Water Heaters - Storage Cabinets - Carts

www.team-spec.com
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  Automated Systems
 
 

 

Automated Systems

PLC Controls

Touch Screen Man Machine Interface

Automated Recipe Processing

Linear Automation

Rotary Automation

Linear Automation System

  • State of the art
  • Linear Actuation
  • Down to Two Second Bath to Bath Transfer Speed
  • Ergonomic Controls
  • Integrated Process Parameters

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Rotary Actuated System

  • Economic
  • Proven Technology
  • Down to Four Second Bath to Bath Transfer Speed
  • Ideal for Small Footprint Requirements

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