SPEC - Semiconductor Process Equipment Corp.

We specialize in integrated wet bench systems for any cleanroom environment.

Wet Benches - Silicon Wafers 2" to 300mm - Specialized Substrates 300mm x 300mm and up to 700mm diameter - Polysilicon Chunk Cleaning - Quartz Tubes - Crucible Filaments - Disk Drive Media and Heads - Bump Packaging - Electroless and Electroplating - UBM Under Bump Metallization - Wafer Processing - Etch - Solvent - Diffusion - Prediffusion - Oxide - Nitride - Resist - Photo resist - Biotech - DNA Arrays - Subdermal Sensors - PLC Programmable Logic Controllers - Quartz Tanks - Linear Transfer - Rotary Transfer - Chemical Dispense Systems - Waste Collection Systems - Water Heaters - Storage Cabinets - Carts

www.team-spec.com
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Software
 
 

 

Software

Touch Screen (Monochrome or Color)

PC Based Computerized Control

Programmable Logic Controller (PLC)

Storage Capacity of up to 50 Recipes

Factory Interface Protocols

Bath Life Monitoring

Automatic Bath Change

 

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